Interferometric electropolisher for controlled surface removal
- 1 September 1975
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 46 (9), 1171-1173
- https://doi.org/10.1063/1.1134430
Abstract
An apparatus is described which allows the preparation of transmission electron microscopy specimens at specified depths of the order of 1 μ below the initial surface of the specimen. The instrument is designed for electropolishing of the surface with in situ measurements by optical interference of the depth of material removed. The depth of the electropolish may be determined to an accuracy of approximately ±500 Å, and high‐quality specimens may be easily prepared.Keywords
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