Study of r.f. magnetron-sputtered MoSe2 films by electron spectroscopy for chemical analysis

Publisher Website

1 September 1985

journal article
Published by Elsevier in Thin Solid Films

Vol. 131 (1), 87-94
https://doi.org/10.1016/0040-6090(85)90377-3

Abstract

No abstract available

Keywords

MAGNETRON SPUTTERING

This publication has 6 references indexed in Scilit:

XPS: Energy calibration of electron spectrometers. 2—Results of an interlaboratory comparison
Surface and Interface Analysis, 1984
Morphological and compositional properties of MoSe2 films prepared by r.f. magnetron sputtering
Thin Solid Films, 1984
Moisture-resistant MoS2-based composite lubricant films
Thin Solid Films, 1983
Friction properties of sputtered dichalcogenide layers
Tribology International, 1981
Lubrication properties of r.f. sputtered MoS2 layers with variable stoichiometry
Thin Solid Films, 1979
High-Resolution X-Ray Photoemission Spectrum of the Valence Bands of Gold
Physical Review B, 1972

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