Accurate microscopic method to investigate the aging of micromachined silicon actuators
- 31 May 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 43 (1-3), 317-321
- https://doi.org/10.1016/0924-4247(93)00702-6
Abstract
No abstract availableKeywords
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