Microfabrication of complex surface topographies using grey-tone lithography
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3), 89-94
- https://doi.org/10.1016/0924-4247(94)00868-i
Abstract
No abstract availableKeywords
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- One-step 3D shaping using a gray-tone mask for optical and microelectronic applicationsMicroelectronic Engineering, 1994
- Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfacesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1994
- Simulation of lithographic images and resist profilesMicroelectronic Engineering, 1990