Growth of ZnSe Films on InxGa1-xAs Substrate by Metalorganic Vapor Phase Epitaxy

Abstract
This letter discusses ZnSe epitaxial layers grown on lattice-matched In x Ga1-x As (x=0.032) substrates by metalorganic vapor phase epitaxy. These films emit a stronger near-bandedge photoluminescence at room temperature than ZnSe layers on GaAs substrates do when the film thickness is less than 1 µn. However, self-activated emission intensity, which has been reduced remarkably by decreasing the impurities piled up near the substrate surface, is independent of the lattice parameter of the substrate.