AUGER ELECTRON SPECTROSCOPY MADE QUANTITATIVE BY ELLIPSOMETRIC CALIBRATION
- 15 March 1971
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 18 (6), 226-228
- https://doi.org/10.1063/1.1653640
Abstract
Auger electron spectroscopy has been calibrated for various atoms absorbed on clean silicon surfaces by using ellipsometry. The Auger peak heights, measured as the first derivative of the energy distribution, were found to be proportional to surface coverage up to 1.5 monoatomic layer. The advantages of this particular combination of techniques are discussed.Keywords
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