Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams
- 1 May 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (5A), L293
- https://doi.org/10.1143/jjap.23.l293
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Carbon buildup by ion-induced polymerization under 100–400 keV H, He and Li bombardmentNuclear Instruments and Methods, 1981
- Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etchingJournal of Applied Physics, 1979
- Ion Beam Exposure of Resist MaterialsJournal of the Electrochemical Society, 1979