New video-enhanced contrast infrared topograph apparatus for evaluation of GaAs crystals
- 1 February 1986
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 57 (2), 202-205
- https://doi.org/10.1063/1.1138969
Abstract
A new IR transmission topograph apparatus in which video image contrast is enhanced greatly by digital processing is developed for fast and nondestructive evaluation of GaAs wafers. Clear topographs of IR (1 μm) absorption in 2-in.-diam GaAs wafers, resulting from the distribution of the native defect EL2, and birefringence, resulting from residual stress, are obtained with good contrast and high signal/noise ratio.Keywords
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