On the intrinsic stress in thin chromium films
- 1 August 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 142 (1), 37-45
- https://doi.org/10.1016/0040-6090(86)90301-9
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
- Intrinsic stress in chromium thin films measured by a Novel methodThin Solid Films, 1984
- Elasticity modulus Ef and temperature expansion coefficient αf of aluminium thin films measured by a new methodThin Solid Films, 1984
- Micromechanics of films, fibrils and interfaces—an overviewThin Solid Films, 1982
- Stress distributions and thin film mechanical propertiesSurface and Interface Analysis, 1981
- Mechanical properties of vacuum-deposited films: A commentaryThin Solid Films, 1978
- Stresses in thin films: The relevance of grain boundaries and impuritiesThin Solid Films, 1976
- The origins of stress in thin nickel filmsThin Solid Films, 1972
- Recent developments in the study of mechanical properties of thin filmsThin Solid Films, 1972
- Internal StressesJournal of Vacuum Science and Technology, 1969
- Intrinsic Stress in Evaporated Metal FilmsJournal of the Electrochemical Society, 1968