Transmission sputtering by high energy heavy ions
- 1 February 1976
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 132, 313-316
- https://doi.org/10.1016/0029-554x(76)90751-5
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Recoil contribution to ion-implantation energy-deposition distributionsJournal of Applied Physics, 1975
- High−energy neutron sputtering yields from gold and niobiumApplied Physics Letters, 1975
- The primary recoil spectrum in the simulation of fast-reactor radiation damage by charged-particle bombardmentJournal of Nuclear Materials, 1975
- Remarks on the theory of fast neutron sputteringJournal of Nuclear Materials, 1974
- Particle Release from Niobium Irradiated with 14-MeV NeutronsPhysical Review Letters, 1974
- Depth distribution of energy deposition by ion bombardmentComputer Physics Communications, 1974
- Heavy-ion range profiles and associated damage distributionsRadiation Effects, 1972
- Spatial distribution of ions incident on solid target as a function of instantaneous energyRadiation Effects, 1971
- Spatial distribution of energy deposited into atomic processes in ion-implanted siliconRadiation Effects, 1970
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969