Neutralization of acceptors in silicon by atomic hydrogen
- 15 November 1984
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 45 (10), 1100-1102
- https://doi.org/10.1063/1.95030
Abstract
Atomic hydrogen can neutralize the following acceptors in silicon: boron, aluminum, gallium, and indium. Up to 1019 B cm−3 have been neutralized. Hydrogen penetration seems to follow a diffusive transport that is impeded by the concentration of binding sites.Keywords
This publication has 4 references indexed in Scilit:
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