The application of liquid metal ion sources to ion-microprobe secondary ion mass spectroscopy
- 31 December 1985
- journal article
- Published by Elsevier in Spectrochimica Acta Part B: Atomic Spectroscopy
- Vol. 40 (5-6), 717-723
- https://doi.org/10.1016/0584-8547(85)80121-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The application of liquid metal ion sources to SIMSVacuum, 1984
- SIMS micro-analysis with a gallium ion microprobeNuclear Instruments and Methods in Physics Research, 1983
- Sensitivity limitations in the analysis of semiconductor devices with auger electron spectrometry (AES) and secondary ion mass spectrometry (SIMS)Analytical and Bioanalytical Chemistry, 1983
- Emission characteristics of gallium and bismuth liquid metal field ion sourcesJournal of Vacuum Science and Technology, 1979
- Evaluation of a cesium positive ion source for secondary ion mass spectrometryAnalytical Chemistry, 1977