Diamond-like films as a protecting insulator for gas-detecting suspended-gate field effect transistors
- 31 August 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 47 (1-3), 746-753
- https://doi.org/10.1016/0257-8972(91)90348-z
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Diamond and diamondlike films: Deposition processes and propertiesJournal of Vacuum Science & Technology A, 1989
- Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layersThin Solid Films, 1981
- Mobile electric charges on insulating oxides with application to oxide covered silicon p-n junctionsSurface Science, 1964