Modelling of a microwave discharge created by a standing surface wave
- 14 June 1992
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 25 (6), 953-959
- https://doi.org/10.1088/0022-3727/25/6/009
Abstract
A standing surface wave discharge can be obtained by reflection of a TM00 surface wave from a short circuit. A standing wave system provides modulation of plasma characteristics. Wave propagation is studied assuming a plasma in which the electron density is modulated whereas the power for plasma maintenance and the electrical field inside the plasma do not depend on the density, as is the case for traveling wave discharges. Then, the authors determine the conditions for the generation of a standing surface wave pattern. Finally, a comparison of experimental results with the model shows that plasma characteristics can be suitably predicted.Keywords
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