Technique for preparing cross‐section transmission electron microscope specimens from ion‐irradiated ceramics

Abstract

The general techniques necessary to produce a high‐quality cross‐sectioned ceramic specimen for transmission electron microscope observation are outlined. A particularly important point is that the width of the glued region between faces of the ceramic specimen must be < 0.2 μm to prevent loss of the near‐surface region during ion milling. A recently developed vise for gluing ceramic cross‐section specimens is described, and some examples of the effect of glue thickness on specimen quality are shown.