Piezoresistive properties of polycrystalline and crystalline silicon films
- 1 March 1987
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 11 (2), 145-155
- https://doi.org/10.1016/0250-6874(87)80013-6
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Piezoresistive properties of polycrystalline siliconJournal of Applied Physics, 1976
- The electrical properties of polycrystalline silicon filmsJournal of Applied Physics, 1975