Examination of CCDs using voltage contrast with a scanning electron microscope
- 31 October 1980
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 23 (10), 1029-1033
- https://doi.org/10.1016/0038-1101(80)90179-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978
- Parallel signal injection in a CCD using an integrated optical channel waveguide arrayIEEE Transactions on Electron Devices, 1978
- Scanning electron microscopy studies on switching lateral transistors in integrated circuitsSolid-State Electronics, 1971
- Electron beam induced potential contrast on unbiased planar transistorsSolid-State Electronics, 1967
- DIRECT MEASUREMENT OF THE DEPLETION LAYER WIDTH VARIATION VS APPLIED BIAS FOR A P-N JUNCTIONApplied Physics Letters, 1965