Sol-gel derived PZT force sensor for scanning force microscopy
- 30 April 1996
- journal article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 44 (1), 25-29
- https://doi.org/10.1016/0254-0584(95)01647-d
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Piezoelectric force sensor for scanning force microscopySensors and Actuators A: Physical, 1994
- Scanning force microscope using a piezoelectric microcantileverJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Piezoelectric Sensor for Detecting Force Gradients in Atomic Force MicroscopyJapanese Journal of Applied Physics, 1994
- Development of a force sensor for atomic force microscopy using piezoelectric thin filmsNanotechnology, 1993
- Dependence of electrical properties on film thickness in Pb(ZrxTi1−x)O3 thin films produced by metalorganic chemical vapor depositionJournal of Applied Physics, 1993
- Tip–sample forces in scanning probe microscopy in air and vacuumJournal of Vacuum Science & Technology A, 1992
- Ferroelectric memoriesFerroelectrics, 1992
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992
- High-displacement piezoelectric actuator utilizing a meander-line geometry I. Experimental characterizationIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991
- Forces in atomic force microscopy in air and waterApplied Physics Letters, 1989