Fabrication of Index-Guided AlGaAs Multiquantum Well Lasers with Buried Optical Guide by Si-Induced Disordering
- 1 August 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (8A), L690
- https://doi.org/10.1143/jjap.25.l690
Abstract
Transverse mode controlled AlGaAs–GaAs multiquantum well(MQW) lasers with buried MQW optical guide (MQWBOG) have been developed using compositional disordering induced by Si ion implantation and subsequent annealing. It is confirmed that the MQW-BOG lasers fabricated by these simple and completely planar processes operate in a fundamental transverse and single longitudinal mode.Keywords
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