Comparing ICP and ECR Etching of HgCdTe, CdZnTe, and CdTe
- 11 July 2007
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 36 (8), 1007-1012
- https://doi.org/10.1007/s11664-007-0163-z
Abstract
No abstract availableKeywords
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