Preparation and characterization of indium tin oxide films produced by the d.c. sputtering technique
- 28 June 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 128 (3), 231-239
- https://doi.org/10.1016/0040-6090(85)90075-6
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Characterization of transparent conductive thin films of indium oxideJournal of Vacuum Science and Technology, 1975
- Highly Conductive, Transparent Films of Sputtered In[sub 2−x]Sn[sub x]O[sub 3−y]Journal of the Electrochemical Society, 1972
- Untersuchungen an halbleitenden IndiumoxydschichtenPhysica Status Solidi (b), 1966