Temperature dependence of lead loss in r.f. magnetron sputtering of a stoichiometric Pb(Zr,Ti)O3 target
- 1 June 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 302 (1-2), 155-161
- https://doi.org/10.1016/s0040-6090(97)00004-7
Abstract
No abstract availableKeywords
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