Auger profiling of ’’abrupt’’ LPE AlxGa1−xAs-GaAs heterojunctions
- 1 July 1977
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 48 (7), 3147-3149
- https://doi.org/10.1063/1.324046
Abstract
Ion milling–Auger electron spectroscopy has been used to study, for the first time, the chemical widths of ’’abrupt’’ LPE AlxGa1−xAs‐GaAs heterojunctions with composition x=0.43, 0.60, and 0.85. ’’Abrupt’’ LPE junctions were found to have chemical interface widths of <90–130 Å.Keywords
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