Ion track doping
- 1 October 1994
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects and Defects in Solids
- Vol. 132 (2), 81-90
- https://doi.org/10.1080/10420159408224299
Abstract
Longitudinal dopant distribution along ion tracks in soft (polymers [1–5]) and hard (diamond [6,7]) condensed carbonaceous matter have been studied by neutron depth profiling and cathodoluminesence. Both in-diffusion from the aqueous phase and energetic ion implantation were used in primary track doping. In-situ self-decoration of tracks and post-implantation with a secondary ion species were used in the specific case of ion implantation. Radial dopant distributions were also studied by means of a modified tomographic procedure. Decorative doping of ion bombarded solids is useful in probing track structure, and especially in pointing the way to potential development of nanometric-sized electronic devices.Keywords
This publication has 12 references indexed in Scilit:
- Implantation of polymers at medium ion fluences: a spatial heterogeneity of radiation damage due to dominant electronic stoppingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- p-Type semiconducting structures in diamond implanted with boron ionsMaterials Science and Engineering B, 1992
- Depth distribution of defects and impurities in diamond and cubic boron nitride after high-energy ion implantationPhysica Status Solidi (a), 1989
- Depth profiles of Li ions implanted in the photoresist AZ111Journal of Materials Research, 1988
- Non-regular depth profiles of light ions implanted into organic polymer filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Implanted boron depth profiles in the AZ111 photoresistJournal of Applied Physics, 1988
- Permeation through latent nuclear tracks in polymer foilsApplied Physics A, 1987
- Spatial distribution of impurities and defects introduced in diamond by high energy ion implantationPhysica Status Solidi (a), 1986
- Distributions of light ions and foil destruction after irradiation of organic polymersJournal of Applied Physics, 1985
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980