Laser Induced Metal and Alloy Plating with Simultaneous Silicide Compound Formation
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Laser-induced metal deposition on InPJournal of Applied Physics, 1982
- Investigation of Laser‐Enhanced Electroplating MechanismsJournal of the Electrochemical Society, 1981
- Photoelectrochemical deposition of microscopic metal film patterns on Si and GaAsApplied Physics Letters, 1981
- Photoelectrochemical etching of p-GaAsApplied Physics Letters, 1981
- Direct observation of epitaxial islands of Pd2Si on (001) SiApplied Physics Letters, 1980
- Refractory silicides for integrated circuitsJournal of Vacuum Science and Technology, 1980
- Dynamics of laser-induced formation of palladium silicideApplied Physics Letters, 1979