Tribological behavior of polycrystalline and single-crystal silicon
- 1 December 1996
- journal article
- Published by Springer Nature in Tribology Letters
- Vol. 2 (4), 355-373
- https://doi.org/10.1007/bf00156908
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
- The sliding friction and wear behavior of single-crystal, polycrystalline and oxidized siliconWear, 1994
- Tribology of Ion Bombarded Silicon for Micromechanical ApplicationsJournal of Tribology, 1993
- Ball-on-flat reciprocating sliding wear of single-crystal, semiconductor silicon at room temperatureWear, 1993
- Static friction of diamond-like carbon film in MEMSSensors and Actuators A: Physical, 1992
- Measurement of wear in polysilicon micromotorsIEEE Transactions on Electron Devices, 1992
- Counterface Material and Ambient AtmospherePublished by American Chemical Society (ACS) ,1992
- Impact, Friction, and Wear Testing of Microsamples of Polycrystalline SiliconMRS Proceedings, 1992
- Silicon micromechanics: sensors and actuators on a chipIEEE Spectrum, 1990
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- Ceramic Wear in Indentation and Sliding ContactA S L E Transactions, 1985