Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range
- 1 September 1977
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 31 (5), 341-343
- https://doi.org/10.1063/1.89692
Abstract
In order to calibrate previous secondary ion mass spectrometry (SIMS) measurements on various oxidized metal surfaces in terms of oxygen coverage, quasisimultaneous SIMS, AES, and XPS have been applied to several metal‐oxygen systems. First, results are given for the Ti‐O system. In this case, the oxygen signals obtained with the three methods show an identical dependence on the oxygen exposure and can therefore be used for establishing a coverage scale. The successive stages of oxidation lead to significant changes of first the AES, then the SIMS signals, and finally a chemical shift in XPS.Keywords
This publication has 15 references indexed in Scilit:
- Developments in secondary ion mass spectroscopy and applications to surface studiesSurface Science, 1975
- Simultaneous observations of partially oxidized surfaces by AES and SIMS for Al, Si, Ti, V, and CrJournal of Vacuum Science and Technology, 1975
- Investigation of surface reactions by the static method of secondary ion mass spectrometry: V. The oxidation of titanium, nickel, and copper in the monolayer rangeSurface Science, 1974
- Investigation of surface reactions by the static method of secondary ion mass spectrometry: IV. The oxidation of magnesium, strontium, and barium in the monolayer rangeSurface Science, 1974
- Surface oxidation studies of iron using the static method of secondary ion mass spectrometry (SIMS)Physica Status Solidi (a), 1974
- Electron spectroscopy - an outlookJournal of Electron Spectroscopy and Related Phenomena, 1974
- Investigation of surface reactions by the static method of secondary ion mass spectrometry: III. The oxidation of vanadium, niobium and tantalum in the monolayer rangeSurface Science, 1973
- Investigation of surface reactions by the static method of secondary ion mass spectrometry: II. The oxidation of chromium in the monolayer rangeSurface Science, 1973
- Auger electron spectroscopySurface Science, 1971
- Analysis of Materials by Electron-Excited Auger ElectronsJournal of Applied Physics, 1968