The effect of target power on the nitrogen partial pressure level and hardness of reactively sputtered titanium nitride coatings
- 1 April 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 171 (1), 171-181
- https://doi.org/10.1016/0040-6090(89)90042-4
Abstract
No abstract availableKeywords
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