Large area smoothing of optical surfaces by low-energy ion beams
- 1 July 2004
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 459 (1-2), 100-105
- https://doi.org/10.1016/j.tsf.2003.12.107
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
- Spontaneous Nanoscale Corrugation of Ion-Eroded: The Role of Ion-Irradiation-Enhanced Viscous FlowPhysical Review Letters, 2001
- Evaluation of AFM tips using nanometer-sized structures induced by ion sputteringApplied Surface Science, 2001
- Evolution of surface topography of fused silica by ion beam sputteringApplied Surface Science, 2001
- Preparation of smooth Si(001) surfaces by glancing angle sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1999
- Ion beam smoothing of indium-containing III-V compound semiconductorsApplied Physics A, 1998
- Preparation by glancing incidence ion irradiation of surfaces with ångstrom-scale RMS roughnessNanotechnology, 1997
- Ion beam smoothing of CVD diamond thin films by etchback methodNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Evolution of surface morphology during growth and ion erosion of thin filmsPhysical Review B, 1996
- Roughening instability and evolution of the Ge(001) surface during ion sputteringPhysical Review Letters, 1994
- Smoothing of chemically vapour deposited diamond films by ion beam irradiationThin Solid Films, 1992