Theoretical analysis of AES depth profiling in multilayers: Application to C/W multilayers
- 1 August 1987
- journal article
- Published by Elsevier in Surface Science
- Vol. 186 (3), 447-459
- https://doi.org/10.1016/s0039-6028(87)80386-2
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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- Depth resolution in sputter profilingApplied Physics A, 1977
- Influence of ion bombardment on depth resolution in Auger electron spectroscopy analysis of thin gold films on nickelThin Solid Films, 1976