A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist
- 21 June 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (5), 590-597
- https://doi.org/10.1088/0960-1317/12/5/312
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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