Damage production at the surface of Si single crystals by 200 keV He+bombardment
- 1 January 1979
- journal article
- Published by Taylor & Francis in Radiation Effects
- Vol. 42 (1-2), 77-81
- https://doi.org/10.1080/10420157908201739
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- Silicon surface studies by means of proton backscattering and proton induced X-Ray emissionRadiation Effects, 1973
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- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955