Lattice imaging of silicide-silicon interfaces
- 1 July 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 93 (1-2), 91-97
- https://doi.org/10.1016/0040-6090(82)90094-3
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Transmission electron microscopy of the formation of nickel silicidesPhilosophical Magazine A, 1982
- Cross-sectional transmission electron microscopy of silicon-silicide interfacesJournal of Applied Physics, 1981
- Silicon/metal silicide heterostructures grown by molecular beam epitaxyApplied Physics Letters, 1980
- Refractory silicides for integrated circuitsJournal of Vacuum Science and Technology, 1980
- Transmission electron microscopy of cross sections of large scale integrated circuitsIEEE Transactions on Electron Devices, 1976
- First phase nucleation in silicon–transition-metal planar interfacesApplied Physics Letters, 1976