Effect of filament temperature and deposition time on the formation of tungsten silicide with silane
- 2 February 2011
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 519 (14), 4447-4450
- https://doi.org/10.1016/j.tsf.2011.01.327
Abstract
No abstract availableKeywords
Funding Information
- Natural Sciences and Engineering Research Council of Canada
- Canada Foundation for Innovation
- University of Calgary
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