High quality ZnSe films grown by low pressure metalorganic vapor phase epitaxy using methylalkyls
- 20 April 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (16), 1065-1067
- https://doi.org/10.1063/1.97971
Abstract
High quality ZnSe layers have been successfully grown by low pressure metalorganic vapor phase epitaxy (MOVPE) using methylalkyls, dimethylzinc, and dimethylselenide. Streaks and Kikuchi lines were observed by reflective high‐energy electron diffraction measurements. Also the sharp and strong excitonic emission line due to free exciton and no emissions related to deep levels or residual impurities were observed by photoluminescence measurements. These results show that the ZnSe layers are of good crystalline quality. Furthermore, good selective growth of the ZnSe films on structured substrates was easily achieved by using this low pressure MOVPE technique.Keywords
This publication has 11 references indexed in Scilit:
- Selective growth of AlxGa1−xAs embedded in etched grooves on GaAs by low-pressure OMVPEJournal of Crystal Growth, 1986
- MOCVD Growth of ZnSxSe1-x Epitaxial Layers Lattice-Matched to GaAs Using Alkyls of Zn, S and SeJapanese Journal of Applied Physics, 1985
- The growth by MOCVD using new group VI sources and assessment by HRTEM and Cl of Zn-based II–VI single crystal layersJournal of Crystal Growth, 1985
- Coherent Growth of ZnSe on GaAs by MOCVDJapanese Journal of Applied Physics, 1985
- Growth of high-purity ZnSe by sublimation THM and the characteristics of the Y and Z deep-level emission linesJournal of Crystal Growth, 1985
- Growth of low-resistivity high-quality ZnSe, ZnS films by low-pressure metalorganic chemical vapour depositionJournal of Crystal Growth, 1985
- The MOCVD growth of ZnSe using Me2Zn, H2Se and SeEt2Journal of Crystal Growth, 1984
- The use of heterocyclic compounds in the organometallic chemical vapour deposition of epitaxial ZnS, ZnSe and ZnOJournal of Crystal Growth, 1984
- Growth and characterization of undoped ZnSe epitaxial layers obtained by organometallic chemical vapour depositionThin Solid Films, 1978
- Organometallic vapor deposition of epitaxial ZnSe films on GaAs substratesApplied Physics Letters, 1978