The pressfet: an integrated electret-mosfet based pressure sensor
- 31 August 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 14 (4), 349-360
- https://doi.org/10.1016/0250-6874(88)80024-6
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- A theoretical analysis of the electret air-gap field-effect structure for sensor applicationsSensors and Actuators, 1986
- A silicon pressure sensor using mos ring oscillatorsSensors and Actuators, 1985
- Theoretical considerations in the design of integrated semiconductor sensors applying electretsIEEE Transactions on Electron Devices, 1985
- MOS Integrated silicon pressure sensorIEEE Transactions on Electron Devices, 1985
- Structural Composition of Polymers Relative to Their Plasma Etch CharacteristicsJournal of the Electrochemical Society, 1982
- Integrated silicon microbeam PI-FET accelerometerIEEE Transactions on Electron Devices, 1982
- Micromechanical accelerometer integrated with MOS detection circuitryIEEE Transactions on Electron Devices, 1982
- Measurement of potential buildup and decay, surface charge density, and charging currents of corona-charged polymer foil electretsJournal of Applied Physics, 1976
- CHARGING OF POLYMER FOILS WITH MONOENERGETIC LOW-ENERGY ELECTRON BEAMSApplied Physics Letters, 1970
- The metal-nitride-oxide-silicon (MNOS) transistor—Characteristics and applicationsProceedings of the IEEE, 1970