Reduction of Pinhole Leakage Current of SrTiO3 Films by ArF Excimer Laser Deposition with Shadow Mask (“Eclipse Method")
- 1 April 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (4B), L610
- https://doi.org/10.1143/jjap.33.l610
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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