Thermodynamics of Silicon Nitridation: Effect of Hydrogen
- 1 November 1982
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 65 (11), C‐180-180
- https://doi.org/10.1111/j.1151-2916.1982.tb10790.x
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- The effects of hydrogen on the nitridation of siliconJournal of Materials Science, 1979
- The influence of hydrogen in the nitriding gas on the strength, structure and composition of reaction-sintered silicon nitrideJournal of Materials Science, 1979
- Thermodynamics of Silicon Nitride and OxynitridePublished by Springer Nature ,1977
- Effect of H2‐N2 Nitriding Atmospheres on the Properties of Reaction‐Sintered Si3N4Journal of the American Ceramic Society, 1975
- Mass Spectrometric Studies of the Nitridation of SiliconJournal of the American Ceramic Society, 1975