Contactless inspection of planar electronic devices by capacitive coupling: Development of a model describing the sensor signal and its impact on signal post-processing
- 31 December 2011
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 172 (1), 88-97
- https://doi.org/10.1016/j.sna.2011.02.040
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Modelling the capacitive coupling of sensors applied to the contactless inspection of planar electronicsProcedia Engineering, 2010
- Feasibility study of TFT-LCD array tester using low voltage micro-columnsMicroelectronic Engineering, 2008
- Independent component analysis-based defect detection in patterned liquid crystal display surfacesImage and Vision Computing, 2007
- A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection systemJournal of Mechanical Science and Technology, 2007
- Automatic defect inspection of patterned thin film transistor-liquid crystal display (TFT-LCD) panels using one-dimensional Fourier reconstruction and wavelet decompositionInternational Journal of Production Research, 2005
- In-Process Functional Testing of Pixel Circuit in AM-OLEDsIEEE Transactions on Electron Devices, 2005
- Optical charge-sensing method for testing and characterizing thin-film transistor arraysIEEE Journal of Selected Topics in Quantum Electronics, 1995
- Electron-beam testing of flat panel display substratesMicroelectronic Engineering, 1994
- Functional testing of TFT/LCD arraysIBM Journal of Research and Development, 1992
- Application of capacitance techniques in sensor designJournal of Physics E: Scientific Instruments, 1986