Plasma immersion ion implantation with dielectric substrates
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 24 (6), 1383-1388
- https://doi.org/10.1109/27.553205
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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