Design optimization for cantilever-type accelerometers
- 1 October 1984
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 6 (2), 81-92
- https://doi.org/10.1016/0250-6874(84)85001-5
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Integrated silicon microbeam PI-FET accelerometerIEEE Transactions on Electron Devices, 1982
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- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979