Deposition of μc-Si and μc-SiC thin films by remote plasma-enhanced chemical-vapor deposition
- 31 May 1991
- journal article
- Published by Elsevier in Solar Cells
- Vol. 30 (1-4), 419-434
- https://doi.org/10.1016/0379-6787(91)90075-z
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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