Analysis of AlN thin films by combining TOF-ERDA and NRB techniques
- 1 November 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 289 (1-2), 159-165
- https://doi.org/10.1016/s0040-6090(96)08927-4
Abstract
No abstract availableThis publication has 27 references indexed in Scilit:
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