The surface chemistry of aluminum nitride MOCVD on alumina using trimethylaluminum and ammonia as precursors
- 31 December 1994
- journal article
- Published by Elsevier in Surface Science
- Vol. 320 (1-2), 145-160
- https://doi.org/10.1016/0039-6028(94)00512-5
Abstract
No abstract availableThis publication has 90 references indexed in Scilit:
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