On the use of actinometric emission spectroscopy in SF6-O2 radiofrequency discharges: Theoretical and experimental analysis
- 1 September 1985
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 5 (3), 239-253
- https://doi.org/10.1007/bf00615123
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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