Integrated grating-type Schottky-barrier photodetector with optical channel waveguide
- 1 June 1975
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 26 (11), 632-635
- https://doi.org/10.1063/1.88005
Abstract
A grating‐type Schottky‐barrier photodetector has been incorporated within an optical channel waveguide. Silicon is used as the base material for future integration of optical and electronic components. The fabrication processes are simple and completely compatible with the standard silicon planar technology. Estimated responsivity of the detector is 0.33 μA/μW at a wavelength of 0.6328 μm with nanosecond response time.Keywords
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