Expansion of amorphous carbon in W/C multilayers after annealing
- 10 December 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (24), 2549-2551
- https://doi.org/10.1063/1.103833
Abstract
Dynamical optical dispersion theory is employed to analyze the variations of the positions and intensities of x-ray diffraction peaks from the W/C multilayer. It is confirmed that the thickness of the C layer expands with the annealing temperature and the multilayer remains undamaged until 800 °C. There is an obvious drop of interfacial root mean square (rms) roughness at 600–800 °C.Keywords
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