Surface micromachining technology applied to the fabrication of a FET pressure sensor
- 1 March 1996
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 6 (1), 80-83
- https://doi.org/10.1088/0960-1317/6/1/018
Abstract
This paper presents a novel surface-micromachined pressure sensor based in a FET device. The diaphragm acts as the gate of the transistor and the gate - source voltage varies in a nearly linear form with pressure when keeping constant the current along the channel. Both theoretical characteristics and the technological process are analysed. Finally the advantages over existing microsensors are examined.Keywords
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