Initial Oxidation and Hydroxylation of the Ge(100)-2×1 Surface by Water and Hydrogen Peroxide

Abstract

We use density functional theory to investigate the surface chemistry of initial oxidation and hydroxylation of the Ge(100)-2×1 surface by water and hydrogen peroxide. Comparison of the reaction of water on the Si(100)-2×1 and Ge(100)-2×1 surfaces shows that the kinetics of oxidation of the Ge(100)-2×1 surface with water is slower. Our calculations also show that oxidation products on the Ge(100)-2×1 surface are less thermodynamically stable than on Si. We also investigate two competing dissociation reactions of H₂O₂ on the Ge(100)-2×1 surface. We find that dissociative adsorption via cleavage of the OH bond is less exothermic than OO dissociation. Furthermore, interdimer OO dissociation has a lower activation barrier than interdimer or intradimer OH dissociation, although interdimer dissociation products are found to be less stable compared than those formed from intradimer dissociation reactions. Finally, we find that the oxidation products formed from hydrogen peroxide are more stable than those formed from water.