Etching front control of strips for corner compensation
- 1 June 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 37-38, 727-732
- https://doi.org/10.1016/0924-4247(93)80123-x
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978